International Journal of Science, Engineering and TechnologyAuthors: Mr. Kaustubh Kumar Shukla, Dr. Rashi Agarwal
Abstract: The integration of Micro-Electro-Mechanical Systems (MEMS) and Artificial Intelligence (AI) has ushered in a new era in healthcare and environmental monitoring. MEMS devices enable miniaturized, low-cost, and high-sensitivity sensing, while AI provides powerful data analytics and decision-making capabilities. This paper reviews the evolution and synergy of MEMS and AI applications in healthcare and environmental domains, identifies key research gaps, and proposes a framework for robust, real-time, and scalable monitoring systems. Our methodology leverages multi-modal MEMS sensors, AI-driven data fusion, and secure communication protocols. Results from existing literature and prototype implementations demonstrate improved accuracy and efficiency in disease detection, patient monitoring, and pollutant surveillance. We discuss current challenges, including sensor calibration, data privacy, and interpretability of AI models. The paper concludes with future directions for MEMS-AI systems, emphasizing the potential for personalized medicine, smart cities, and sustainable environmental stewardship.
DOI: http://doi.org/10.5281/zenodo.18068575
